使用MEMS传感器(微电机械系统)在随后的数字化和通过控制器线性化的重视场中的倾斜度。数据输出通过CANopen接口或模拟信号进行。倾斜传感器具有稳定的铝壳(可选的不锈钢)。槽可用于机械对准(最高约。±7.5°)。在CANopen的情况下,可以任选地选择一个连接器或一个阳/母连接器组合以进行连接目的。外壳中的铸造措施导致保护等级IP 69K,例如,在水下使用。MEMS传感器是使用硅散装微机械技术制造的集成电路。这些微机械结构用于形成双重容量。如果这些结构在加速度的情况下被偏转,例如,例如,如果 gravitational acceleration (g), this results in capacity changes, which are registered and further processed using measuring technology. Due to the differential capacity dependency described here, the output voltage follows the function U ∝ g *sin α. In this case, the angle α is the inclination angle of the sensor measured against the g vector. These sensors measure precisely, have a long service life and are very robust. The measuring axes operate independently of each other.