升华炉IT-GRV-330/350/2300

晶体生长 腔室 管状

IT-GRV-330/350/2300 TMAX可用于4英寸SIC散装晶体生长应用的2300°C升华生长反应器：用于物理蒸气转运（PVT）的晶体生长在修改后的其他方法之后其他应用后，体积SIC单晶的生长BE：高纯度SIC原材料产品规范的合成最重要的特征感应炉，顶载设计4英寸SIC散装晶体生长最大。工作温度2300°C MF加热功率30 kW工作频率8-10 kHz加工气体氮，氩气，氢，二压操作5 - 950 mbar真空/加斯特室/加斯特室，通过水冷双玻璃管设置真空泵2x 10-5 mbar with turbomolecular pump (685 l/s) High-purity graphite felt insulation (halogen-purified) We make it possible: Linn High Therm is specialized in adapting its products to customer’s requirements. Please let us know if you need any modifications. We will do everything to satisfy your wishes. Possible standardized options Crucible rotation and displacement Crucible bottom pyrometer Emergency water cooling Process Guiding Software Bottom-loader design Circulation cooling unit Crystal growth training by renowned German research institute