Low profile, short-stroke XY stages with linear motors and micron-grade linear encoders Stroke (mm) 10x10 Repeatability (µm) 0.5 Resolution (µm) 0.5 Load capacity (kg) 2.5 Velocity (mm/sec) 500 Drive mechanism direct drive Motor linear, core-less, servo Size (mm) - 65x65 Height (mm) - 15